Optoelectronic-VLSI packaging with polarization-selective computer-generated holograms.

We present what is believed to be the first packaged module incorporating polarization-based beam-forming optics integrated with an optoelectronic-VLSI device. The chip has multiple quantum-well modulators and detectors that are flip-chip bonded onto a silicon CMOS integrated circuit. In the assembled module a polarization-selective computer-generated hologram converts linearly polarized light into a two-dimensional spot array to illuminate the output modulators. The lenslets do not interfere with the input data or the reflected output, which is orthogonally polarized. We demonstrate a 9x10 modulator array, showing good spot-intensity uniformity and registration with modulators.